Automated TEM Analysis Platform
Contract award notice published on TED on 2 Oct 2026 by Imec EU Pilot line NV (Belgium), CPV 38000000 Laboratory, optical and precision equipments (excl. glasses). Awarded to FEI EUROPE BV.
| Notice | 679782-2026 (can-standard) |
|---|---|
| Status | Contract award |
| Published | 2 Oct 2026 |
| Buyer | Imec EU Pilot line NV, Heverlee |
| Country | Belgium |
| Main CPV | 38000000-5 Laboratory, optical and precision equipments (excl. glasses) |
| Contract type | supplies |
| Procedure | neg w call |
| Tenders received | 1 |
| Award decision | 13 Aug 2026 |
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Description
The object of this tender is the supply and commissioning of 2 300 mm full wafer automated TEM sample preparation tool. Both tools should be able to load 300mm wafers and allow for high-accurate automate TEM sample preparation. Both tools should be able to do full automated sample preparation of quality and ultra-thin samples (sub 20nm). Automated end-pointing of the TEM sample needs to be precise within nanometer range on a specific structure. In-system gas injection for carbon, TEOS and tungsten deposition is required.
Lots (1)
| Lot | Title | Estimated value | Deadline |
|---|---|---|---|
| LOT-0001 | JPA2026ID27A-28 - 1 |
Winners
- FEI EUROPE BV Zaventem, Belgium, size: large
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