CONTRACT AWARD NOTICE: Optical film stress measurement tool

Contract award notice published on TED on 23 Oct 2026 by VTT Technical Research Centre of Finland Ltd (Finland), CPV 38000000 Laboratory, optical and precision equipments (excl. glasses). Awarded to LOT-Quantum Design GmbH for EUR 660,000.

Open on TED

Description

This is a contract award notice under the Finnish Act on Public Procurement and Concession Contracts, setting out the outcome of the procurement. THE OBJECT OF THE TENDER PROCESS The object of the procurement is a 200 mm automated film stress and wafer bow analysis system using a non-contact laser scanning technique for the VTT Micronova cleanroom. The procurement includes a room temperature automated thin-film stress measurement system, cassette load lock, robot to handle the wafers, programmable automatic wafer scanning system, and analysis software. The tool should be designed to be used inside the clean room. The supplier will take to consideration the environmental conditions of the tool installation location and will work together with VTT to reduce the external impact on facility. The automated thin-film stress analysis system is for non-patterned, non-texture 200 mm wafer stress measurement. The technical specification of the object of the tender and its minimum requirements is described in more detail in this Annex 1 of the invitation to tender. The tendered Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1 and Annex 2 (“Facilities, materials and connector types”). A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 80 % price weighting and 20 % quality weight

Lots (1)

Winners

• LOT-Quantum Design GmbH

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