'%3E%3Cpath fill='%23FFFFFF' d='M4.0 73.5L4.0 3.9L18.8 4.2L33.5 4.5L33.5 73.5L33.5 142.5L18.8 142.8L4.0 143.1L4.0 73.5ZM81.7 142.3C80.9 141.6 80.7 49.0 81.5 49.0C82.0 49.0 105.0 72.5 108.4 76.6L111.0 79.8L111.0 111.4L111.0 143.0L96.7 143.0C88.8 143.0 82.0 142.7 81.7 142.3ZM164.0 99.3C141.7 75.3 119.7 51.5 115.0 46.5C97.9 28.4 77.5 5.9 77.2 5.0L76.8 4.0L95.8 4.0L114.7 4.0L120.1 9.8C123.1 12.9 144.4 35.7 167.5 60.3L209.5 105.2L209.8 54.6L210.0 3.9L224.8 4.2L239.5 4.5L239.5 73.5L239.5 142.5L222.0 142.8L204.5 143.0L164.0 99.3ZM292.7 142.3C292.3 142.0 292.0 127.7 292.0 110.6L292.0 79.5L306.3 64.3C314.1 56.0 320.8 49.1 321.2 49.1C321.7 49.0 322.0 70.1 322.0 96.0L322.0 143.0L307.7 143.0C299.8 143.0 293.0 142.7 292.7 142.3ZM428.7 142.3C428.3 142.0 428.0 117.0 428.0 86.8L428.0 32.0L407.2 32.0L386.5 32.0L376.5 18.8C371.0 11.6 366.4 5.3 366.2 4.8C366.0 4.4 402.4 4.0 447.0 4.0L528.2 4.0L527.7 5.5C527.4 6.2 522.9 12.5 517.8 19.4L508.5 31.9L483.2 32.0L458.0 32.0L458.0 87.5L458.0 143.0L443.7 143.0C435.8 143.0 429.0 142.7 428.7 142.3ZM517.4 141.3C517.8 140.4 526.2 126.1 536.2 109.6C569.0 55.2 594.6 12.6 597.0 8.2L599.4 4.0L612.1 4.0L624.8 4.0L649.3 44.8C662.7 67.2 681.2 97.9 690.3 113.2C699.5 128.4 707.0 141.3 707.0 141.9L707.0 143.0L690.6 143.0L674.3 143.0L643.9 92.3C627.1 64.4 613.0 41.5 612.5 41.4C611.7 41.1 594.6 68.7 570.3 109.6L567.1 115.0L590.0 115.0L612.9 115.0L622.9 128.3C628.5 135.6 633.0 141.9 633.0 142.3C633.0 142.7 606.9 143.0 574.9 143.0L516.8 143.0L517.4 141.3ZM734.7 142.4C734.4 142.1 739.2 135.8 745.3 128.4L756.5 115.1L800.0 115.0L843.5 115.0L847.0 113.2C848.9 112.2 851.3 109.8 852.3 107.9L854.1 104.5L853.7 100.2L853.2 95.9L850.9 93.3C849.6 92.0 847.6 90.3 846.5 89.7L844.5 88.5L807.5 88.0L770.4 87.5L763.8 84.2L757.1 80.9L752.6 75.9C748.1 70.9 744.1 62.6 745.4 61.2C745.8 60.8 767.4 60.4 793.3 60.2L840.5 59.9L847.0 61.0C859.9 63.2 870.4 69.9 877.1 80.3L880.9 86.2L882.6 93.8L884.3 101.4L883.1 107.8C881.5 116.6 878.6 122.2 872.2 129.1L866.8 135.0L860.6 137.9C857.3 139.5 852.1 141.3 849.2 141.9L843.9 143.0L789.6 143.0C759.8 143.0 735.1 142.7 734.7 142.4ZM1015.1 129.8C1007.6 122.6 999.5 114.7 997.0 112.4L992.6 108.0L1002.4 98.8C1007.9 93.7 1012.6 89.5 1013.0 89.5C1013.9 89.5 1068.4 140.8 1068.8 142.1L1069.2 143.0L1049.0 143.0L1028.8 143.0L1015.1 129.8ZM922.2 73.2L922.5 4.5L937.2 4.2L952.0 3.9L952.0 39.0L952.0 74.1L953.8 72.8C954.9 72.1 972.0 56.3 991.9 37.8L1028.1 4.0L1048.6 4.0C1059.8 4.0 1069.0 4.2 1069.0 4.4C1069.0 4.9 1068.9 5.0 1006.1 64.1C978.4 90.2 948.5 118.4 939.6 126.7C930.8 135.1 923.2 142.0 922.7 142.0C922.3 142.0 922.1 111.1 922.2 73.2ZM724.6 41.3L719.8 40.9L720.5 37.2C722.4 27.0 732.1 14.5 742.0 9.5C744.7 8.1 749.9 6.3 753.4 5.5L759.9 4.0L819.5 4.2L879.0 4.5L867.8 18.2L856.6 32.0L808.8 32.0L760.9 32.0L757.7 33.4C755.9 34.1 753.2 36.2 751.6 38.0L748.9 41.3L739.2 41.5C733.9 41.7 727.3 41.6 724.6 41.3ZM299.2 4.3C302.4 4.1 307.6 4.1 310.8 4.3C313.9 4.5 311.3 4.6 305.0 4.6C298.7 4.6 296.1 4.5 299.2 4.3Z'/%3E%3Cpath fill='%231A99FE' d='M292.2 32.0L292.5 5.0L307.3 4.7L322.0 4.5L322.0 16.0L322.0 27.5L311.8 38.5C306.2 44.5 299.7 51.6 297.3 54.2C294.9 56.9 292.7 59.0 292.4 59.0C292.2 59.0 292.1 46.8 292.2 32.0Z'/%3E%3C/g%3E%3C/svg%3E){kind=small}
EU TendersUpgrade of a 200 mm WxZ Tungsten CVD Chamber to WxZ Sprint Configuration
Title in German as published on TED.
Contract award notice published on TED on 4 Nov 2026 by IHP GmbH - Leibniz-Institut für innovative Mikroelektronik (Germany), CPV 42990000 Miscellaneous special-purpose machinery. Awarded to SFI Solutions for Instruments GmbH.
| Notice | 766817-2026 (can-standard) |
|---|---|
| Status | Contract award |
| Published | 4 Nov 2026 |
| Buyer | IHP GmbH - Leibniz-Institut für innovative Mikroelektronik, Frankfurt (Oder) |
| Country | Germany |
| Main CPV | 42990000-2 Miscellaneous special-purpose machinery |
| Contract type | supplies |
| Procedure | neg w call |
| Tenders received | 2 |
| Award decision | 21 Sep 2026 |
Daily EU tender alerts
Basic $19 a month, up to 5 filters. Pro $49 a month, up to 30 filters and tenders closing within 5 days. Charged in UAH at the National Bank of Ukraine rate on the payment day.
Description
Gegenstand der Beschaffung ist das Upgrade eines bestehenden 200 mm Wolfram Chemical Vapor Deposition (CVD)-Systems des Herstellers Applied Materials Inc. (AMAT) auf eine WxZ Sprint Konfiguration. Hierzu sind insbesondere Anpassungen am Gasverteilungssystem zur Realisierung eines gepulsten Wolfram-Abscheidungsprozesses sowie die Integration zusätzlicher Hardware zur Ermöglichung von Depositionsdrücken bis 300 Torr erforderlich. Die Leistungen umfassen die Planung, Lieferung, Integration, Inbetriebnahme und Qualifizierung der erforderlichen Hard- und Softwareanpassungen am bestehenden Anlagensystem.
Lots (1)
| Lot | Title | Estimated value | Deadline |
|---|---|---|---|
| LOT-0001 | Upgrade of a 200 mm WxZ Tungsten CVD Chamber to WxZ Sprint Configuration |
Winners
- SFI Solutions for Instruments GmbH Allershausen, Germany, size: small
Other CPV codes
- 31712100 Microelectronic machinery and apparatus
More Miscellaneous special-purpose machinery in Germany
Get new miscellaneous special-purpose machinery tenders by email
A free weekly digest of new competition notices from TED. One-click unsubscribe in every email.
Daily EU tender alerts
Basic $19 a month, up to 5 filters. Pro $49 a month, up to 30 filters and tenders closing within 5 days. Charged in UAH at the National Bank of Ukraine rate on the payment day.